Porous Silicon Preparation by Electrochemical Etching in Ionic Liquids

Porous Silicon Preparation by Electrochemical Etching in Ionic Liquids Full article

Journal

ACS Sustainable Chemistry & Engineering
ISSN: 2168-0485

Output data

Year: 2020, Volume: 8, Number: 27, Pages: 10259-10264 Pages count : 6 DOI: 10.1021/acssuschemeng.0c03133

Authors

Saverina Evgeniya A. ^1,2 , Zinchenko Daria Yu. ¹ , Farafonova Sofia D. ^3,1 , Galushko Alexey S. ¹ , Novikov Andrei A. ⁴ , Gorbachevskii Maxim V. ⁴ , Ananikov Valentine P. ¹ , Egorov Mikhail P. ¹ , Jouikov Viatcheslav V. ² , Syroeshkin Mikhail A. ¹

Affiliations

1	N. D. Zelinsky Institute of Organic Chemistry, Moscow 119991, Russia
2	University of Rennes, UMR CNRS 6226, ISCR (Institut des Sciences Chimiques de Rennes), 35000 Rennes, France
3	Dmitry Mendeleev University of Chemical Technology of Russia, 125047 Moscow, Russia
4	Gubkin University, Moscow 119991, Russia

Anodic etching of n-type {111} silicon in ionic liquid (IL) systems ([RMIM][X], R = H, Bu; X = BF4–, PF6–), realized under galvanostatic conditions and at room temperature, allowed the formation of porous silicon surfaces with different pore morphology depending on the etching time, current density, and the IL used. The study of the effect of water content in IL on the etching process has shown a water content of 1% to be optimal. The role of the anion on the etching process was elucidated using 1-methylimidazolium tetrafluoroborate ([HMIM][BF4]) and 1-methylimidazolium hexafluorophosphate ([HMIM][PF6]) IL systems. [HMIM][BF4] was found to be most efficient for the formation of a silicon nanostructured array with a pore size of 30–80 nm. The thus-prepared porous silicon samples show fluorescence in blue light (475 nm). The NMR spectra of [HMIM][BF4] ionic liquid before and after etching do not show noticeable changes, which makes it possible to consider this IL as a potentially recyclable etching agent.

Saverina E.A. , Zinchenko D.Y. , Farafonova S.D. , Galushko A.S. , Novikov A.A. , Gorbachevskii M.V. , Ananikov V.P. , Egorov M.P. , Jouikov V.V. , Syroeshkin M.A.
Porous Silicon Preparation by Electrochemical Etching in Ionic Liquids
ACS Sustainable Chemistry & Engineering. 2020. V.8. N27. P.10259-10264. DOI: 10.1021/acssuschemeng.0c03133 WOS Scopus OpenAlex

Web of science:	WOS:000551360900031
Scopus:	2-s2.0-85088655292
OpenAlex:	W3034443221

DB	Citing
OpenAlex	23
Scopus	26
Web of science	20